- Description:
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The Kavli Nanolab at TU Delft is a research facility that concentrates the nanoscience activities in Delft, from the Department of Quantum Nanoscience and the Department of Bionanoscience. The Kavli Nanolab provides a technological infrastructure for the fabrication and inspection of functional nanostructures. The facility specializes in high-resolution charged particle-beam structuring down to sub-10 nm details, fabrication of quantum devices and bio imaging and super resolution microscopy. Kavli Nanolab offers 24/7 low-threshold user access to high-end, state-of-the-art process and inspection equipment for academic as well as industrial users.
Electron beam lithography is an essential process technology at Kavli Nanolab Delft for the users in order to fabricate their nanostructures with both ultrahigh and low resolution features, varying in size from a few nanometres up to tens of millimetres. The substrates used have lateral dimensions varying from several millimetres up to full 8" wafer and 7" mask size and thicknesses up to ten millimetres.
The current EBL systems are running more than 8250 exposure jobs, using 6000 user operation hours per year. The unique power of the EBPG's advanced pattern generator UPG with its available basic and advanced shapes and the flexibility of user-definable shapes, offering off-beam step size-grid writing and full control on writing strategy is also a necessity. Both EBPG's have the same control software with user interface. The complete EBPG can be controlled from the software, and shell scripts and C-programs can and have been set up for automation and to make use easier for the large amount of users.
It is the Universities belief, that Raith B.V. is the only supplier that offers the unique combination of required specifications and additional needs/benefits of/for the university, which are necessary for the most successful continuation of the Electron Beam Lithography service to internal and external users. The TU Delft intends to award the contract for the replacement of the EBPG5000Plus by the purchase of the EBPG5200Plus to Raith B.V.
- Type:
- Unsealed
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