157038 ICP RIE ETCHER and PECVD

Description:

The ICP RIE and PECVD systems will be purchased as part of the Interreg North West Europe OIP4NWE program. This program has been set up to bring the production of Photonic Integrated Circuits in InP to a TRL of 7. Therefore the need of a Wafer loading system with direct loading from a standard 3"and 4"cassette system.
 

Generate hyperlink

Type:

Sealed without Preselection

Offer phase:

6 Aug 2020 8:10 — 17 Sep 2020 14:00