164446 ICP PECVD, ICP PECVD TEOS & ICP Chlorine etcher

Description:

The subject of the contract is the delivery of one (1) ICP Chlorine etcher and one (1) ICP PECVD to expand the current facilities of the Kavli Nanolab (KN) and one (1) ICP PECVD TEOS to expand the current facilities of the Else Kooi Laboratorium (EKL). The subject of this tender includes:

• specification;
• requirements and offered preferences;
• manufacturing;
• factory acceptance test;
• freight and shipping (DDP incoterms 2010);
• start up on site, excluding hook up;
• site acceptance test;
• manual and documentations;
• training of personnel.

Generate hyperlink

Type:

Sealed without Preselection

Offer phase:

16 Nov 2020 19:00 — 6 Jan 2021 10:00