202724 ICP Oxide etcher

Description:

The Object of the contract is the delivery of one (1) ICP oxide etcher to replace a 15 year old ICP Bosch/oxide etcher and to separate the oxide etching process and the Bosch process onto two dedicated systems both for Bosch etching and oxide etching. The update to a new Bosch etcher is finished and now TU Delft would like to invest into a state of art oxide etcher. The system will expand the current facilities of the Kavli Nanolab (KN).

The subject of this tender includes: 

• design, specification and manufacturing of the ICP Oxide etcher in accordance with the requirements and other specifications indicated in chapter 5 of this Call for Tender;
• offered preferences in the Supplier's tender;
• factory acceptance test;
• packaging;
• freight and shipping (DDP incoterms 2010) till place of installation;
• start up on site, excluding hook up;
• site acceptance tests and test reports;
• manual and documentations;
• training of personnel
• warranty period.

The maximum budget for this tender is € 805.000,- excluding VAT. All prices should be in EURO, exchange rates will not have any effect on the budget. A tender with a quoted price above € 805.000,- is considered invalid and shall be set aside.

Generate hyperlink

Type:

Sealed without Preselection

Offer phase:

21 Jun 2022 15:00 — 8 Aug 2022 13:00